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| Subset | Description |
|---|---|
| Copper Deposition | Copper Vapor Deposition on a silicon dioxide surface |
| Fluorocarbon Polymer Deposition | Flurocarbon deposition on a generic surface such as chamber walls |
| Fluorocarbon Polymer Deposition and Removal | Flurocarbon deposition on a generic surface such as chamber walls, includes sputtering by ions |
| Polymer Deposition on Silicon Dioxide | Fluorocarbon deposition on silicon dioxide. Explicitly includes activation of polymer surface sites. |