Manager and Senior Member of Technical Staff, TEL Technology Center, America, LLC.
Area of expertise: Modeling and Simulation of Plasma Etch; Plasma Etch Process Development; Plasma Diagnostics
Director at KLA Corporation, USA.
Area of expertise: hardware design, manufacturing process development and modelling of plasma processes for various stages of microelectronics device fabrication.
Principal Member of Technical Staff and Senior Director, Applied Materials Inc., USA.
Area of expertise: Modelling of plasma processing systems, physics and chemistry of plasma materials processing
Sumeet C. Pandey
Principal Engineer, ab initio Research Lead, Technology Development, Micron Technology Inc.
Area of expertise: Atomistic simulations of plasma-material interactions for deposition and etch, First-principles-based materials and emerging device modeling, DFT-based calculations of surface and gas-phase chemistry and spectroscopy
Professor of Chemistry, Research group PLASMANT, University of Antwerp , Belgium
Area of expertise: Plasma chemistry modelling, plasma reactor modelling, modelling plasma-surface interactions and experiments, mainly for environmental/energy and medical applications
Researcher, PLASMI Lab at CNR NANOTEC Bari , Italy
Area of expertise: state-resolved electron-molecule cross section calculations, molecular structure.
Bastiaan J. Braams
Professor of physics, "Centrum Wiskunde & Informatica (CWI)", the Dutch National Centre for Nathematics and Computer Science, the Netherlands.
Area of expertise: molecular dynamics for scattering and spectroscopy
Unit Head, Atomic and Molecular Data Unit, Nuclear Data Section,International Atomic Energy Agency (IAEA), Vienna, Austria
Area of expertise: database design, online interfaces, molecular spectroscopy, atomic and molecular data.
Emeritus Professor of Physical Chemistry, School of Chemistry, University of Manchester, UK
Area of expertise: Plasma chemistry. Use of atmospheric, non-thermal plasma for the removal and conversion of environmental pollutants and the production of high-value products and fuels from methane and carbon dioxide.
Senior Professor, Natural Sciences Faculty, Tata Institute of Fundamental Research, Mumbai. Fellow, Indian Academy of Sciences, Bangalore.
Area of expertise: Measurement of electron ionization and dissociative attachment cross sections, dynamics of molecular negative ions, photoionization and photodetachment, electron and ion spectrometry including momentum imaging.
Professor of physics, CNRS Research Director at Laboratoire de Physique des Plasmas, Ecole Polytechnique, Palaiseau, France. Fellow of AVS.
Area of expertise: Laser and other optical diagnostics of plasmas in reactive gases. Physics and chemistry of radiofrequency plasmas for surface processing
Massey Professor of Physics, Fellow of the Royal Society, Department of Physics and Astronomy, University College London, UK
Area of expertise: electron molecule scattering cross sections calculations, molecular structure and molecular spectroscopy
Associate Professor, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Research Professor, Department of Physics, West Virginia University, USA
Area of expertise: Low temperature plasma science, plasma diagnostics and simulations.
Deputy Director of Plasma Technology Research Center, National Fusion Research Institute, Korea
Area of expertise: Atomic and molecular data evaluation, generation of plasma processing data set, and data analysis.
Professor of physics, Director of Le Laboratoire des Sciences des Procédés et des Matériaux (LSPM), CNRS-INSIS, France
Area of expertise: plasma diagnostics, low temperature plasma, analytical plasma modelling
Levitt Professor of Physics, Fellow of the American Physical Society, Department of Physics & Astronomy, Drake University, Des Moines, Iowa, USA
Area of expertise: electron and photon collisions with atoms and ions
Luis Lemos Alves
Professor of Physics, Instituto Superior Técnico, Universidade de Lisboa, Portugal
Head of group N-Plasmas Reactive: Modelling and Engineering (N-PRiME) with Instituto de Plasmas e Fusão Nuclear.
Area of expertise: Plasma modelling and simulation, fluid modelling of dc/rf/microwave reactors, kinetic modelling using Chemistry-Boltzmann solvers, data assessment, verification and validation
Fellow of the AVS, Professor of Physics and Associate Dean of Natural Sciences , University of Texas at Dallas Richardson TX, USA
Areas of expertise: Experimental IR absorption and electron impact excitation cross section measurements. Experimental and computational plasma physics.
Professor of Physics, National Centre for Plasma Science Technology, Dublin City University, Dublin, Ireland
Area of expertise: Plasma theory and simulation, plasma chemistry modelling, verification and validation
Professor of Molecular Physics, Head of School of Physical Sciences, The University of Kent, UK
Area of expertise: experimental electron molecule scattering cross sections and molecular spectroscopy
Professor of Mechanical Engineering and Associate Department Head, University of Minnesota, Minneapolis, MN, USA
Director High Temperature and Plasma Laboratory
Area of expertise: Plasma diagnostics, non-equilibrium plasma physics and chemistry, plasma technologies for environmental, chemical, energy, biomedical and decontamination application, plasma-surface interactions, multiphase plasmas in and in contact with liquids
Professor of physics, Center for Atomic and Molecular Technologies, School/Graduate School of Engineering, Osaka University, Japan
Area of expertise: theoretical and computational plasma physics, strongly coupled plasmas, plasma processing. Board of reviewers for plasma chemistry sets
Leading scientist, Head of theoretical Group, Microelectronics Department, Skobeltsyn Institute of Nuclear Physics at Moscow State University
Area of expertise: Physical processes in gas discharges, plasma chemistry and plasma-surface interaction.
Professor of Low Temperature Plasmas, Head of Research in the Department of Physics, University of York, UK
Areas of expertise: plasma science and technology, advanced optical diagnostics, computational modelling, plasma dynamics, chemical kinetics.
Professor of Physics, Ruhr-Universität Bochum, Institute for Plasma und Atomic Physics, Germany
Area of expertise: Basic plasma physics, plasma sources, plasma diagnostics, spectroscopy, non-linear optics, atomic / molecular physics
Professor of physics Department of Engineering Physics, Tsinghua University, Beijing, China
Area of expertise: diagnostics for low temperature plasmas, discharge physics, plasma instabilities, plasma source development
Professor Emeritus, Institute of Space and Astronautical Science, Sagamihara, Japan
Area of expertise: Theoretical studies of electron collisions with atoms and molecules and photoionization of atoms and molecules. Compilation and evaluation of atomic and molecular data.
Zoran Lj. Petrović
Professor of Physics, Fellow of Serbian Academy of Sciences and Arts and of American Physical Society, Institute of Physics, University of Belgrade, Serbia
Area of expertise: electron-molecule scattering, swarms and transport of electrons, positrons and ions, physics of ionized gases, gas discharges, plasma diagnostics and modeling, plasma applications including plasma medicine