Chemistries available in QDB (32).
Chemistry sets in this section are self-consistent and their self-consistency is established using plasma modelling software.
The star ranking is reflecting the level of validation available for this chemistry set. It is based on four approaches:
More details about validation can be found here
|Rating||Description of comparison conditions|
|The chemistry is self-consistent but simulation results show different behaviour than the available experimental measurements.|
|The chemistry is self-consistent but has not yet been compared with experimental or theoretical data, contribution of the data for comparison is welcome.|
|The chemistry is self-consistent and compares well with measurements for the same process conditions: Power, Gas flow, Pressure. Your contribution of the validation data is welcome.|
|The chemistry is self-consistent and compares well with measurements for process conditions variation. For example, validation for different pressure regimes or gas flow in the gas mixture. Your contribution of the validation data is welcome.|
|The chemistry is self-consistent and validated by comparison of results using more than one software model. For example, it was used in Q-P, ChemKin and Q-VT, showed the same trends with parameter variation and compared well with the experimental data. Your contribution of the validation data is welcome.|
|C29||SF$_6$ / CF$_4$/ O$_2$ chemistry||333|
|C35||C2F6 / SiO2(s) plasma etch||0|
|C36||CF4 / SiO2(s)||66|